Features

Assures Top Class Rotation Accuracy of 0.02 μm

Industry’s First High-Accuracy Air Bearings for Z-, R-, and θ-axis.

Gabbro is used in the column, base, and R-axis which guarantees top-class high accuracy over time.

World’s Highest Throughput

within 60 seconds for alignment.

Detector with All Orientation Safety Function

If stylus overload is detected, the emergency stop function is automatically activated to prevent damage to stylus and detector.

Teaching Function for Automatic Measurement

Full automatic operation is possible for everything from measuring multiple sections to printing.

Offset Type Detector Holder Available as an Option (patented)

Various workpieces can be measured easily without interference from the R-axis arm.